| 摘要 |
FIELD: chemical industry; devices for hydrogenation of silicon tetrachloride. ^ SUBSTANCE: the invention is pertaining to production of polycrystalline silicon within the closed cycle and It is dealt with the device used for conversion of the silicon tetrachloride created in the process of production of polycrystalline silicon into trichlorosilane. The device for hydrogenation of silicon tetrachloride consists of: the body with the branch-pipes for delivery and withdrawal of the steam- gas mixture into the reaction chamber; the heaters made in the form of the plates connected with the current leads insulated from the body; the body is made water-cooled and is mounted on the water-cooled underpan, inside the body there are two coaxially mounted bell-type cylindrical screens; the external screen is made out of stainless steel, the internal screen is made out of carbon-carbon composite and forms the reaction chamber, and the space between the screens forms the chamber of preliminary heating of the steam-gas mixture; the screens are made with the holes for the steam-gas mixture passing through, at that the external screen has the hole in its lower part for delivery of the steam-gas mixture into the chamber of preliminary heating bottom-up, and the interior screen has the hole in the upper bell-shaped part for its delivery into the reaction chamber top-down; the heaters are made out of the carbon-carbon composite, mounted inside the reaction chamber and are located uniformly along the circumference in the volume of the chamber at an angle to each other on the water-cooled current leads insulated from the underpan of the reactor by bushes made out of fluoroplastic placed in the quartz insulators, at that the heaters are made in the form of the U-shaped plates. The ration of the total area of the surfaces of the heaters to the free area of the reaction chamber makes 0.12-0.18. The technical result of the invention is the increased output of trichlorosilane, reduced cost of the design due to exclusion of the high-cost fittings from it, reduction of power input per a unit of the produced trichlorosilane. ^ EFFECT: the invention ensures the increased output of trichlorosilane, reduced cost of the design due to exclusion of the high-cost fittings from it, reduction of power input per a unit of the produced trichlorosilane. ^ 4 cl, 1 dwg |
