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发明名称
CHAMBER FOR FABRICATING SEMICONDUCTOR DEVICE
摘要
申请公布号
KR20060008443(A)
申请公布日期
2006.01.27
申请号
KR20040056181
申请日期
2004.07.20
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
CHO, JUNG SIK
分类号
H01L21/3065
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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