| 摘要 |
A versatile substrate transportation system is provided which can cope with various processing devices with high degrees of freedom. For this purpose, a tunnel ( 101 ) is arranged to connect a plurality of processing devices ( 102 ). The tunnel ( 101 ) and processing devices ( 102 ) are not directly connected but via interface devices ( 103 ). That is, the tunnel ( 101 ) is connected at its lower surface to the interface device ( 103 ), and the interface device ( 103 ) is connected at its side surface to the processing device ( 102 ). The interface device ( 103 ) is arranged below the tunnel ( 101 ) at a height corresponding to a substrate reception port of the processing device ( 102 ).
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