发明名称 |
Storage container for receiving precision substrates such as wafers |
摘要 |
A storage container for receiving precision substrates such as wafers, having increased strength and improved drying ability when washed. The storage container has a letter L-shaped circumferential wall ( 12 ) projectingly provided on an outer wall face, the circumferential wall functioning as a gasket insertion groove ( 12 a). A first flange ( 13 ) horizontally extending from the lower end face of the letter L-shaped circumferential wall ( 12 ) and a second flange ( 14 ) horizontally extending from a position 10-30 mm lower than the first flange are respectively formed integrally with the container. Vertical ribs ( 15 ) are formed between the lower face of the first flange ( 13 ) and the upper face of the second flange ( 14 ).
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申请公布号 |
US2006019411(A1) |
申请公布日期 |
2006.01.26 |
申请号 |
US20050531304 |
申请日期 |
2005.04.14 |
申请人 |
PLA-NET CORP. |
发明人 |
UEDA SHIGEAKI;WATANABE YASUYUKI |
分类号 |
B65D85/86;H01L21/00;H01L21/304;H01L21/673 |
主分类号 |
B65D85/86 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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