| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a deformable mirror with which the distance between an electrode substrate and a membrane can be accurately kept, and material cost of which is low. <P>SOLUTION: The mirror includes an electrode substrate 11 having a plurality of electrodes (16a, 16b, 16c, 16d, 16e) formed on the surface, a silicon membrane 13 having a counter electrode opposing to the plurality of electrodes formed on the electrode substrate 11, a reflecting part 15 disposed on the side of the silicon membrane 13 opposite to the counter electrode, and a supporting plate 19 stuck integrally with the electrode substrate 11 to restrict deformation of the plurality of electrodes so as not to obstruct deformation of the silicon membrane 13. On the electrode substrate 11, wiring patterns (11a, 11b, 11c, 11d, 11e) are formed in a plurality of layers to apply driving voltages on the plurality of electrodes. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
