AIN SINGLE CRYSTAL AND ITS GROWTH METHOD

摘要

PROBLEM TO BE SOLVED: To grow an AlN single crystal on an AlN seed crystal without generating polycrystallization. SOLUTION: In a method for growing the AlN single crystal in which the AlN single crystal 3 is grown on the AlN seed crystal 2 by a sublimation method, the AlN single crystal 3 is grown while bringing the AlN single crystal 3 into contact with an inner wall 12w of a crystal growth vessel 12 and also so that a crystal growth rate VEat the end part of a crystal growth interface 3s of the AlN single crystal 3 becomes smaller than a crystal growth rate VCat the center part of the crystal growth interface 3s. COPYRIGHT: (C)2006,JPO&NCIPI