OXIME DERIVATIVES AND THE USE THEROF AS LATENT ACIDS

摘要

The invention pertain to novel photoacid generator compounds of the formula (I, II or III), Wherein R₁ is for example C₁-C₁₈alkylsulfonyl or phenylsulfonyl, phenyl-C₁-C₃alkylsulfonyl, , naphthylsulfonyl, anthracylsulfonyl or phenanthrylsulfonyl, all optionally substituted, or R₁ is a group (a, b or c); X₁, X₂ and X₃ independently of each other are O or S; R'₁ is e.g. phenylenedisulfonyl, naphthylenedisulfonyl, diphenylenedisulfonyl, or oxydiphenylenedisulfonyl, all optionally substituted; R₂ is halogen or C₁-C₁₀haloalkyl; X is halogen; Ar₁ is for example biphenylyl or fluorenyl, or is substituted naphthyl; Ar'₁ is heteroarylene, optionally substituted; R₈, R₉, R₁₀ and R₁₁ for example are C₁-C₆alkyl which is unsubstituted or substituted by halogen; or R₈, R₉ and R₁₀ are phenyl which is unsubstituted or substituted by C₁-C₄alkyl or halogen; or R₁₀ and R₁₁ together are 1,2-phenylene or C₂-C₆alkylene which is unsubstituted or substituted by C₁-C₄alkyl or halogen.