发明名称 INTEGRATED CIRCUIT COMPRISING A CAPACITOR WITH METAL ELECTRODES, AND METHOD OF PRODUCING ONE SUCH CAPACITOR
摘要 <p>The invention relates to an integrated circuit (IC) comprising at least one capacitor with metal electrodes, whereby at least one of said electrodes (10 or 30) is made from silicon or a silicon alloy having hemispherical grains and being silicided at least on the surface thereof. The invention also relates to a production method which can be used to obtain one such capacitor with silicided metal electrodes.</p>
申请公布号 WO2006008356(A1) 申请公布日期 2006.01.26
申请号 WO2005FR01400 申请日期 2005.06.07
申请人 STMICROELECTRONICS (CROLLES 2) SAS;KONINKLIJKE PHILIPS ELECTRONICS N.V.;HALIMAOUI, AOMAR;EL FARHANE, REBHA;FROMENT, BENOIT 发明人 HALIMAOUI, AOMAR;EL FARHANE, REBHA;FROMENT, BENOIT
分类号 H01L21/02;H01L29/92;(IPC1-7):H01L21/02 主分类号 H01L21/02
代理机构 代理人
主权项
地址