发明名称 |
Semiconductor device whose analysis point can be found easily |
摘要 |
Marking lines or patterns are formed among dummy patterns or on a reference plain of a semiconductor device requiring analysis to enable easy location of a point on the semiconductor device. |
申请公布号 |
KR100546354(B1) |
申请公布日期 |
2006.01.26 |
申请号 |
KR20030052090 |
申请日期 |
2003.07.28 |
申请人 |
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发明人 |
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分类号 |
H01L21/304;H01L21/66;H01L21/30;H01L21/3205;H01L21/321;H01L21/822;H01L23/52;H01L23/544;H01L27/04 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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