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发明名称
METHOD FOR COMPENSATION BOUNDARY OF THE HOLE PATTERN ARRAY
摘要
申请公布号
KR20060007754(A)
申请公布日期
2006.01.26
申请号
KR20040056991
申请日期
2004.07.21
申请人
HYNIX SEMICONDUCTOR INC.
发明人
PARK, CHAN HA
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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