| 摘要 |
<P>PROBLEM TO BE SOLVED: To predict future product quality using current production-equipment process parameters under a manufacturing process and actual measurement values collected from previous several lots of products. <P>SOLUTION: A quality predicting system includes mainly an inference modeling means 100 and a prediction modeling means 200. Its inference method and prediction method are selected to be adapted to features of the actual production equipment, and the inference modeling means 100 can be applied with virtual measurement. The system further includes a self-searching means 160 and a self-adjusting means 180 for selecting the best combination of parameters and functions used by algorithms, and for meeting the requirements of new features and inference/prediction accuracy of a production equipment 20. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
