| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape variable mirror with which damage of a mirror or driving devices can be prevented by releasing stress to be generated at the joint parts among the mirror and the driving devices. SOLUTION: The shape variable mirror is driven so as to correct the wavefront of incident light. In the shape variable mirror, a bar-shaped member (103) is provided between a mirror part (101) and the driving device (102) of a pertinent mirror part and the mirror is equipped with a block part (107) whose length in the longitudinal direction is 0.2 to 0.6 times as long as the length of the bar-shape member and whose cross-sectional area is 9 to 64 times as large as the cross-sectional area of the member in a plane vertical to the longitudinal direction at a position including the center of the longitudinal direction of the member. COPYRIGHT: (C)2006,JPO&NCIPI
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