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发明名称
APPARATUS FOR SENSING TEMPERATURE IN FURNACE OF SEMICONDUCTOR
摘要
申请公布号
KR20060007546(A)
申请公布日期
2006.01.26
申请号
KR20040056369
申请日期
2004.07.20
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KIM, JUNG NAM
分类号
G01K1/12;G01K7/02
主分类号
G01K1/12
代理机构
代理人
主权项
地址
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