| 摘要 |
PROBLEM TO BE SOLVED: To provide a solution coating apparatus capable of approximately evenly supplying a solution to a plurality of nozzle heads without requiring a solution supply pipe to be wide. SOLUTION: A solution coating apparatus comprises a liquid supply tank 12 for storing a solution, a liquid supply pipe 13 whose one end is connected to the liquid supply tank for supplying the solution stored in the liquid supply tank, a plurality of nozzle heads 7 connected in parallel through respective liquid supply valves 15 to the liquid supply pipe, a liquid discharge pipe 23 to which the respective nozzle heads are connected in parallel through liquid discharge valves 21 and which is for discharging the solution supplied through the liquid supply pipes when defoaming is carried out for the respective nozzle heads, a branching valve 24 installed is one end of the liquid supply pipe for distributing a portion of the solution supplied from the supply tank to the liquid discharge pipe when the solution is applied to a substrate, and a flow-in-valve 26 for leading in a solution distributed to the liquid discharge pipe by the branching valve from the other end of the liquid supply tank. COPYRIGHT: (C)2006,JPO&NCIPI |
