| 摘要 |
A method of monitoring contact holes of an integrated circuit using corona charges is provided for determining whether the contact holes are open. The method includes transmitting corona charges over a unit chip having contact holes on a semiconductor wafer; measuring the surface voltage of the unit chip; making a graph illustrating a relationship between the amount of corona charges transmitted and the measured surface voltage of the unit chip; and analyzing the graph to determine whether the contact holes of the unit chip are open. According to the method of the present invention, contact holes may be monitored at an in-line state when manufacturing an integrated circuit by transmitting corona charges onto a unit chip, eliminating the need to use a scanning electronic microscope, thereby preventing a reduction in yield. |
