发明名称 Semiconductor devices to reduce stress on a metal interconnect
摘要 Semiconductor devices to reduce stress on a metal interconnect are disclosed. A disclosed semiconductor device comprises: a semiconductor substrate; an uppermost metal interconnect formed on the semiconductor substrate; an oxide layer formed on the substrate and the uppermost metal interconnect; an aluminum layer formed on the oxide layer; and a stress-relief layer formed on the aluminum layer to thereby prevent cracking of the passivation layer during a subsequent packaging process, to increase reliability of the passivation layer, and to prevent degradation of properties of the semiconductor device.
申请公布号 US2006017168(A1) 申请公布日期 2006.01.26
申请号 US20050205376 申请日期 2005.08.17
申请人 DONGBUANAM SEMICONDUCTOR, INC. 发明人 LEE JAE S.
分类号 H01L23/52;H01L23/31 主分类号 H01L23/52
代理机构 代理人
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