Vorrichtung und Verfahren zur Nassreinigung oder zum Ätzen eines flachen Substrats,申请号DE1997632392T-传众专利搜索

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发明名称	Vorrichtung und Verfahren zur Nassreinigung oder zum Ätzen eines flachen Substrats
摘要
申请公布号	DE69732392(T2)	申请公布日期	2006.01.26
申请号	DE1997632392T	申请日期	1997.06.23
申请人	INTERUNIVERSITAIR MICROELECTRONICA CENTRUM VZW, LEUVEN-HEVERLEE	发明人	MEURIS, MARC;MERTENS, PAUL;HEYNS, MARC
分类号	B08B1/00;H01L21/00;H01L21/304;H01L21/306	主分类号	B08B1/00
代理机构		代理人
主权项
地址

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