发明名称 PHOTORESIST COMPOSITION AND METHOD FOR MANUFACTURING LIQUID CRYSTAL DISPLAY OR SEMICONDUCTOR DEVICE USING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a photoresist composition having excellent coating uniformity and stain inhibitory properties after coating so that it can be easily applied to real industrial fields and it can improve working environments due to the reduction of amounts to be consumed, the decrease of time to be required for manufacture, etc., when manufactured on a large scale. <P>SOLUTION: The photoresist composition comprises (a) a novolak resin, (b) a diazide compound and (c) a solvent containing propylene glycol methyl ether acetate and trimethylpentanediolmonoisobutylate. A method for manufacturing a liquid crystal display or a semiconductor device using the same is also provided. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006023734(A) 申请公布日期 2006.01.26
申请号 JP20050181457 申请日期 2005.06.22
申请人 DONGJIN SEMICHEM CO LTD 发明人 KANG HOON;LEE SEUNG-UK;JUN WOO-SIK;PARK DAE-YOUN;KIM JU-HYUK;KIM BYUNG-UK
分类号 G03F7/004;G03F7/022;G03F7/023;H01L21/027 主分类号 G03F7/004
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