发明名称 |
Cooling apparatus |
摘要 |
A cooling apparatus arranged in a vacuum or reduced pressure atmosphere for use with an optical element having an illuminated area onto which light is irradiated concave part includes a temperature variation mechanism that changes a temperature of part of the cooling apparatus in a non-contact manner.
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申请公布号 |
US2006017896(A1) |
申请公布日期 |
2006.01.26 |
申请号 |
US20050232987 |
申请日期 |
2005.09.23 |
申请人 |
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发明人 |
HARA SHINICHI;SAKAMOTO EIJI;MIWA YOSHINORI;HASEGAWA YASUO;KINO YOSHIKI |
分类号 |
F25B21/02;G03B27/52;G03F7/20;H01L21/027 |
主分类号 |
F25B21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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