TUNABLE FABRY-PEROT FILTER

摘要

A tunable Fabry Perot filter (TFPF) uses the hybrid integration of MEMS and micro-optics. The mirrors forming the TFPF are actively aligned to provide a high finesse TFPF. One of the reflectors is mounted to a flexible member, for example a beam member fixed at both ends. The flexible member is deflectable in a direction parallel to the axis of the TFPF so as to adjust the gap between the reflectors, thus tuning the TFPF. One or both of the mirrors may be deposited on the end of an optical fiber.