APPARATUS FOR CORRECTING OPTICAL PROXIMITY EFFECT ON THE MASK PATTERN,申请号KR20040056990-传众专利搜索

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发明名称	APPARATUS FOR CORRECTING OPTICAL PROXIMITY EFFECT ON THE MASK PATTERN
摘要
申请公布号	KR20060007753(A)	申请公布日期	2006.01.26
申请号	KR20040056990	申请日期	2004.07.21
申请人	HYNIX SEMICONDUCTOR INC.	发明人	YIM, DONG GYU
分类号	H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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