STRUCTURE OF EXPOSURE DEVICE ON THE PHOTO LITHOGRAPHY,申请号KR20040056989-传众专利搜索

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发明名称	STRUCTURE OF EXPOSURE DEVICE ON THE PHOTO LITHOGRAPHY
摘要
申请公布号	KR20060007752(A)	申请公布日期	2006.01.26
申请号	KR20040056989	申请日期	2004.07.21
申请人	HYNIX SEMICONDUCTOR INC.	发明人	CHOI, JAE SEUNG
分类号	H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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