GAS ABATEMENT

摘要

Low-cost apparatus is described for treating an effluent fluid stream from a process tool. In one embodiment, the apparatus comprises an abatement device 12 and a liquid ring pump 14 for at least partially evacuating the abatement device 12. During use, the abatement device 12 converts one or more components of the effluent stream, for example F2 or a PFC, into one or more liquid-soluble compounds, for example HF, that are less harmful to the environment. The liquid ring pump 14 receives the effluent stream and a liquid, and exhausts a solution of the liquid and the liquid-soluble component of the effluent stream. The liquid ring pump 14 thus operates as both a wet scrubber and an atmospheric vacuum pumping stage.