| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a new fluorine-containing polymerizable ester compound which is useful as a raw material for functional materials, medicines, agricultural chemicals and the like and particularly useful for the monomer for the polymer to manufacture the base resin for radiation-sensitive resist composition. <P>SOLUTION: The fluorine-containing polymerizable ester compound is expressed by general formula (1) or (2). Wherein, R<SP>1</SP>is a hydrogen atom, a methyl group or a trifluoromethyl group; R<SP>2</SP>is a divalent hydrocarbon group; R<SP>3</SP>is a hydrogen atom, a univalent hydrocarbon group; R<SP>2</SP>and R<SP>3</SP>may couple with each other to form a ring together with the carbon atoms with which they are bonded; R<SP>4</SP>is a hydrogen atom, a hydroxy group or a univalent hydrocarbon group; and R<SP>5</SP>is an acid-unstable group. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
