| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To achieve the enhancement of profile precision. <P>SOLUTION: A control order value=lip model is formed and the control order value is calculated using a model from the lip shape corresponding to the profile of a film to be measured. By utilizing the control order value as a feedback signal, the film having high profile precision showing a result largely different in a slight environmental change can be produced. At this time, an optimizing technique represented by genetic algorithm is used in the calculation of the control order value from the lip shape. Further, a function for renewing the parameter of the model at any time is provided and the model can be made more accurate with respect to the function not only to still more enhance the profile precision of the film but also to deal with a change with the elapse of time. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
