| 摘要 |
PROBLEM TO BE SOLVED: To provide an infrared detecting element suppressing the generation of thermal noises. SOLUTION: The element comprises a substrate 1, an infrared absorber 2, two beams 3 connecting the infrared absorber 2 and the substrate 1, and at least two thermopiles 4 provided on the beams 3 and consisting of a first material, n-type poly-Si film 4b and a second material, p-type poly-Si film 4a with smaller conductivity than n-type poly-Si film 46. The cross sectional area of the thermopile 4 consisting of the p-type poly-Si film 4a is made larger than the cross sectional area of the thermopile 4 consisting of the n-type poly-Si film 4b. The thermopile 4 consisting of the p-type poly-Si film 4a is arranged at a location close to the middle of the infrared detection element. The thermopile 4 consisting of the n-type poly-Si film 4b is arranged outside the thermopile 4 consisting of the p-type poly-Si film 4a in the constitution. COPYRIGHT: (C)2006,JPO&NCIPI
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