| 摘要 |
PROBLEM TO BE SOLVED: To provide an analyzer 11 capable of analyzing the three-dimensional distribution of an element including the depth direction from the surface of an object 12 to be analyzed. SOLUTION: The same position of the object 12 to be analyzed is multiply irradiated with a laser beam L and a change in the fluorescence intensity of the element to be determinated is monitored from the fluorescence F emitted by irradiating the object 12 to be analyzed with the laser beam L. If the fluorescence intensity suddenly lowers by a reduction in the number of shots of the laser beam L, it is sensed that the element to be analyzed adheres to the surface of the object 12 to be analyzed. If the fluorescence intensity is not lowered even if the number of shots of the laser beam L is increased, it is sensed that the element to be analyzed is present up to the deep part in the object 12 to be analyzed. The three-dimensional distribution of the element including the depth direction from the surface of the object 12 to be analyzed can be analyzed. COPYRIGHT: (C)2006,JPO&NCIPI
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