| 摘要 |
<P>PROBLEM TO BE SOLVED: To form the phase contrast image of matter without using an exclusive optical member (phase plate). <P>SOLUTION: Fourier transform is performed using the respective pixel data of a first data group expressing the complex amplitude distribution of the matter image formed on the image surface of an image forming optical system on the basis of the direct light and diffracted light from matter (S2) and a second data group (S4) expressing the complex amplitude distribution on the pupil surface of the image forming optical system is formed. Then, processing for shifting the phase of the complex amplitude of the pixel data by predetermined quantity is performed with respect to the pixel data corresponding to the passing position of direct light of the specific region of the pupil surface in the respective pixel data of the second group (S4) to form a third data group. Further, inverse Fourier transform is performed using the respective pixel data of the third data group to form a fourth data group expressing the complex amplitude distribution on the image surface. Then, the respective pixel data of the fourth data group is used to calculate the square of the absolute value of the complex amplitude of the pixel data (S5) to form a fifth data group. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
