| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an aligning system and method which enable easy and quick registration of two substrates. <P>SOLUTION: This device first moves drive panel 20 in X and Y axial directions by using the X and Y stages to make the position of the specific alignment mark M20A on the drive panel 20 agree with the position of the specific alignment mark M10A on the sealing panel 10 in a state that the panel 20 is facing the sealing panel 10. Then, it turns the drive panel 20 around the rotation axis J by using the θ stage to make the position of the other alignment mark M20B on the drive panel 20 agree with the position of the other alignment mark M10B on the sealing panel 10. By moving and turning the drive panel 20 only once, the drive panel 20 is aligned to the sealing panel 10 with high precision. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
