EXPOSURE METHOD AND METHOD FOR PRODUCING DEVICE

摘要

Disclosed is an exposure method wherein a substrate is adequately exposed to light while maintaining a liquid in a desired state. The upper surface (1A) of a base (1) constituting a substrate (P) to be exposed to light via a liquid has an effective region (4) which is covered with a photosensitive material (2). At least a part of the surface of the base (1) around the effective region (4) is covered with a first material (3) so that the surface of the base (1) is not in contact with the liquid around the effective region (4).