INSPECTION EQUIPMENT OF CIRCUIT BOARD AND INSPECTION METHOD OF CIRCUIT BOARD

摘要

Inspection equipment and an inspection method of a circuit board capable of performing highly reliable electrical inspection even if a circuit board to be inspected has electrodes arranged at a fine pitch. An interconnection pin unit (31) is provided with an intermediate holding plate (36), a first supporting pin (33) arranged between a first insulation plate (34) and the intermediate holding plate (36), and a second supporting pin (37) arranged between a second insulation plate (35) and the intermediate holding plate (36), wherein the first butting/supporting position of the first supporting pin to the intermediate holding plate is located differently from a second butting/supporting position of the second supporting pin to the intermediate holding plate on the projection plane of the intermediate holding plate in the thickness direction thereof. A first anisotropic conductive sheets (22) consisting of conduction path forming parts formed by laser machining and a part insulating these conduction path forming parts from each other is integrated on a pitch conversion substrate (23) side to constitute a pitch conversion adaptor body (60). Alternatively, an interconnection substrate (29) having an insulating part (62) and a conduction path forming part (61) penetrating the insulating part (62) in the thickness direction is arranged in a plurality of through holes formed in a substrate (73), and electrical connection of the pitch conversion substrate (23) and a circuit board (1) to be inspected is interconnected.