| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor inspection probe card for improving productivity and reliability to performance by internally simplifying circuit configuration transmitting an electric signal and improving manufacture and assemblability. SOLUTION: The semiconductor inspection probe card comprises: an interface member 40 inclined on each connection terminal of an upper face and a lower face at a prescribed angle, joining one end of a connection pin 44 having elasticity, and inserted so as not to be horizontally moved in an internal space of a lower reinforcing plate member 30; a side cover member 80 inserted inward of the lower reinforcing plate member 30 and inserting and supporting a sub-substrate member 50 and a needle guide member 60 mutually joined in an inside diameter part having level difference; and a metal material thin plate crank pin member 90 bolt-tightening one end on the lower reinforcing plate member 30 and having elastic force so as to pressure an outside diameter part having a level difference of the side cover member 80 on the other end. COPYRIGHT: (C)2006,JPO&NCIPI
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