Method for manufacturing solid-state image sensor

摘要

In a method for manufacturing a solid-state image sensor including forming a photodetector portion for a photoelectric conversion in a semiconductor substrate, and forming a shift register for transferring a signal charge read out from the photodetector portion, an annealing is carried out after an ion implantation for forming a buried channel region constituting the shift register. It is possible to provide a method for manufacturing a solid-state image sensor that avoids the formation of crystal defects in a shift register and a photodetector portion and achieves an excellent output image quality and a large saturation electric charge.