发明名称 Method for fabricating a fluid ejection device
摘要 A method of fabricating a fluid ejection device comprises providing a barrier layer which defines fluidic spaces. The fluidic spaces defined by the barrier layer are filled with filler. A throughway is etched through the substrate. The filler is removed from the fluidic spaces after etching the throughway.
申请公布号 US2006016780(A1) 申请公布日期 2006.01.26
申请号 US20040976580 申请日期 2004.10.29
申请人 BENGALI SADIQ 发明人 BENGALI SADIQ
分类号 G11B5/127;H01L21/00 主分类号 G11B5/127
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