CERAMIC ELECTROSTATIC CHUCK EQUIPMENT HAVING EDGE PROJECTED PORTION FOR PREVENTING ARC AND METHOD FOR MANUFACTURING THE EQUIPMENT,申请号KR20040056857-传众专利搜索

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发明名称	CERAMIC ELECTROSTATIC CHUCK EQUIPMENT HAVING EDGE PROJECTED PORTION FOR PREVENTING ARC AND METHOD FOR MANUFACTURING THE EQUIPMENT
摘要
申请公布号	KR20060007696(A)	申请公布日期	2006.01.26
申请号	KR20040056857	申请日期	2004.07.21
申请人	KOMICO LTD.	发明人	AHN, HO KAP
分类号	H01L21/68	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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