发明名称 |
Supporting and lifting device for substrates in vacuum |
摘要 |
A pin assembly for lifting and supporting substrates according to the invention comprises a roller glide for a lift pin with rollers reducing the friction of the vertical pin movement, a ball bearing sole plate with elastic suspension for re-centering the sole plate after one coating cycle and a ball-bearing pin head that lowers the friction between the pin and the substrate and minimizes lateral forces that the substrate can apply on the pin.
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申请公布号 |
US2006016398(A1) |
申请公布日期 |
2006.01.26 |
申请号 |
US20050137230 |
申请日期 |
2005.05.25 |
申请人 |
DUBOST LAURENT;HERNANDEZ SYLVAIN;JAEGER HANS;LANDRY KARINE;VINEL BERTRAND;ZAPODEANU EUGENE;SCHMITT JACQUES;EL BOUCHIKHY REDOUANE |
发明人 |
DUBOST LAURENT;HERNANDEZ SYLVAIN;JAEGER HANS;LANDRY KARINE;VINEL BERTRAND;ZAPODEANU EUGENE;SCHMITT JACQUES;EL BOUCHIKHY REDOUANE |
分类号 |
C23C16/00;C23C16/458;H01L21/687 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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