Optical waveguide probe and scanning near-field optical microscope

摘要

An optical waveguide probe is disclosedwhich is used for a scanning near-field optical microscope, has a low light propagation loss, and is capable of performing an AFM operation, and a manufacturing method thereof is disclosed. The vicinity of the tip of an optical waveguide 2 is bent toward a side of a probe portion 9 through a plurality of surfaces symmetrical with respect to a plane including an optical axis of the optical waveguide 2. By this, a loss of a propagated light 7 at a bent portion 10 is reduced, and the propagated light 7 can be condensed to a minute aperture 5, so that near-field light can be efficiently emitted from the minute aperture 5.