发明名称
摘要 <p>PROBLEM TO BE SOLVED: To prevent any dust spraying up from a floor surface from invading in an upper airtight chamber having an opening by sucking dust ascending from its running floor surface by means of an exhaust fan and discharging it from an exhaust port below the floor. SOLUTION: An automatic guided vehicle is separated into its upper airtight chamber and its lower airtight chamber. The upper airtight chamber is made a transport cargo storing chamber and a cassette and a fan having a filter ceiling use are provided in it. An opening/closing type door is provided on its side surface and clean air is supplied into the upper airtight chamber so as to keep its inside at a positive pressure. Inside of the lower airtight chamber 10, a driving controller easily generating dust is stored. The outer peripheral part is surrounded by covers 12, 13 and flowing-in ports 14, 15 are provided on the upper part of the lower airtight chamber 10. And an exhaust port 16 is formed on the floor surface of the lower airtight chamber 10 and an exhaust fan 11 is provided in its inside. In this way, the exhaust fan 11 is so arranged as to discharge exhaust toward the exhaust port used for downflow. Thus the inside of the lower airtight chamber comes under a negative pressure so as to prevent dust invasion into the inside of the airtight chamber.</p>
申请公布号 JP3739132(B2) 申请公布日期 2006.01.25
申请号 JP19960145168 申请日期 1996.05.14
申请人 发明人
分类号 B61D27/00;B62B5/00;B61B13/00;F24F7/06;H01L21/02;H01L21/677;H01L21/68 主分类号 B61D27/00
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