| 摘要 |
<p>There is being disclosed a pressure testing apparatus for chips on a wafer, the apparatus comprising a pressure chamber, a support plate arranged between the upper and lower parts of the housing, a wafer chuck, a testing means and a positioning device. The wafer chuck, the testing means and the positioning device are supported to the support plate and arranged inside the pressure chamber, and furthermore the support plate comprises inside the pressure chamber an opening providing a gas connection between the upper and lower parts of the housing.</p> |
