发明名称 |
Substrate transport container |
摘要 |
A substrate transport container having a carrier box including a container body and a door hermetically sealably covering an opening provided in the front of the container body. Partitions form a circulating flow path in the carrier box. The circulating flow path has a flow path in which air flows toward substrates and a flow path in which air flows toward a fan. A substrate carrying section is disposed in the flow path in which air flows toward the substrates to carry the substrates in such a way that the principal surfaces of the substrates are approximately parallel to the flow path in which air flows toward the substrates. A particle removing filter and a gaseous impurity trapping filter are placed on the upstream side of the substrate carrying section in the flow path in which air flows toward the substrates. A fan motor for driving the fan is incorporated in the carrier box to form an air current for circulating through the circulating flow path. |
申请公布号 |
EP1067583(A3) |
申请公布日期 |
2006.01.25 |
申请号 |
EP20000114043 |
申请日期 |
2000.07.05 |
申请人 |
EBARA CORPORATION |
发明人 |
TANAKA, AKIRA;OKUBO, KAZUO;SUZUKI, YOKO |
分类号 |
B65G49/00;H01L21/00;B65D85/00;H01L21/673 |
主分类号 |
B65G49/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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