发明名称 |
Method and system for coating internal surfaces of prefabricated process piping in the field |
摘要 |
The coating of internal surfaces of a workpiece is achieved by connecting a bias voltage (20) such that the workpiece functions as a cathode and by connecting an anode (22 and 24) at each opening of the workpiece. A source gas (16 and 18) is introduced at an entrance opening, while a vacuum source (32) is connected at an exit opening. Pressure within the workpiece is monitored (34) and the resulting pressure information is used for maintaining a condition that exhibits the hollow cathode effect. Optionally, a pre-cleaning may be provided by introducing a hydrocarbon mixture and applying a negative bias to the workpiece, so as to sputter contaminants from the workpiece using argon gas (16). Argon gas may also be introduced during the coating processing to re-sputter the coating, thereby improving uniformity along the length of the workpiece. The coating may be a diamond-like carbon material having properties which are determined by controlling ion bombardment energy. |
申请公布号 |
EP1619265(A1) |
申请公布日期 |
2006.01.25 |
申请号 |
EP20050014868 |
申请日期 |
2005.07.08 |
申请人 |
SUB-ONE TECHNOLOGY, INC. |
发明人 |
BOARDMAN, WILLIAM JOHN;TUDHOPE, ANDREW WILLIAM;MERCADO, RAUL DONATE |
分类号 |
C23C16/04;C23C16/26;C23C16/44 |
主分类号 |
C23C16/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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