发明名称 DOUBLE PINNED PHOTODIODE FOR CMOS APS AND METHOD OF FORMATION
摘要 <p>A pinned photodiode, which is a double pinned photodiode having increased electron capacitance, and a method for forming the same are disclosed. The invention provides a pinned photodiode structure comprising a substrate base over which is a first layer of semiconductor material. There is a base layer of a first conductivity type, wherein the base layer of a first conductivity type is the substrate base or is a doped layer over the substrate base. At least one doped region of a second conductivity type is below the surface of said first layer, and extends to form a first junction with the base layer. A doped surface layer of a first conductivity type is over the at least one region of a second conductivity type and forms a second junction with said at least one region of a second conductivity type.</p>
申请公布号 EP1618608(A1) 申请公布日期 2006.01.25
申请号 EP20040749460 申请日期 2004.03.26
申请人 MICRON TECHNOLOGY, INC. 发明人 PATRICK, INNA
分类号 H01L27/146;H01L31/0352;(IPC1-7):H01L27/146;H01L31/035 主分类号 H01L27/146
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