| 摘要 |
PROBLEM TO BE SOLVED: To inexpensively and simply provide a method for manufacturing a microelectrode and a microelectrode built-in microchannel chip, and a high performance microelectrode and the microelectrode built-in microchannel chip obtained thereby. SOLUTION: A metal is vapor-deposited on a polymer substrate and heat- treated to form a metal layer, and after a photoresist is applied to the metal layer, lithography is performed to etch the metal layer to obtain the polymer substrate microelectrode. |
