发明名称 METHOD AND APPARATUS FOR CHEMICAL PLASMA PROCESSING OF PLASTIC CONTAINERS
摘要 A method of treating plastic containers with a chemical plasma by forming a film by CVD on the plastic containers by generating a glow discharge by feeding a gas for plasma treatment and energy such as microwaves for plasmatization into a plasma-treating chamber, wherein the plastic containers are cooled. This method effectively suppresses the plastic containers from being deformed, is capable of forming the film by CVD on the inner surfaces of the plastic containers consecutively for extended periods of time, and greatly enhances the productivity.
申请公布号 EP1619266(A1) 申请公布日期 2006.01.25
申请号 EP20040717827 申请日期 2004.03.05
申请人 TOYO SEIKAN KAISYA, LTD. 发明人 KOBAYASHI, AKIRA;YAMADA, KOJI;AIHARA, TAKESHI;KURASHIMA, HIDEO
分类号 H01J37/32;C23C16/04;C23C16/505;C23C16/511;(IPC1-7):C23C16/44 主分类号 H01J37/32
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