| 摘要 |
A dark field illumination device comprises an illumination light source, which emits illumination light rays, a light shielding plate, which is located between the sample and the illumination light source, and selectively shields the illumination light rays directly entering the observation optical system among the illumination light rays emitted from the illumination light source, an optical member, which directs, toward the sample, the illumination light rays passing outside the illumination light rays shielded by the light shielding plate, and a background member, which is disposed between the sample and the light shielding plate, and has a smooth surface on a side of the sample.
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