| 摘要 |
Methods and apparatus for both coarsely and accurately controlling a scanning stage are disclosed. According to one aspect of the present invention, an apparatus for scanning an object includes a first stage that is coupled to a first actuator which moves the first stage along an axis, as well as a second stage that is arranged to accommodate the object. A first coupler which has first and second ends is aligned along the axis such that the first and second ends of the first coupler contact the first and second stages, respectively. A second coupler which also has first and second ends is aligned along the axis such that the first and second ends of the second coupler contact the first and second stages, respectively. When the first stage scans in a first direction, the first coupler causes the second stage to scan along the axis through the first coupler.
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