发明名称 |
Method of fabricating on-chip spacers for a TFT panel |
摘要 |
A method for fabricating on-chip spacers for a TFT panel exposes a photoresist layer on top of the TFT panel using two exposure processes, one through the bottom of the TFT and the other through a mask over the TFT panel. The exposure process through the bottom exposes all photoresist covering windows on the TFT panel and leaves all photoresist corresponding to an opaque grid corresponding a TFT driving circuit. A second exposure process through a mask above the photoresist leaves part of the photoresist in the opaque grid unexposed. The exposed photoresist is removed leaving on-chip spacers only on the opaque grid. Therefore, the on-chip spacers can not affect the display quality and can be easily formed on a high dpi TFT panel.
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申请公布号 |
US6989299(B2) |
申请公布日期 |
2006.01.24 |
申请号 |
US20030373623 |
申请日期 |
2003.02.25 |
申请人 |
FORHOUSE CORPORATION |
发明人 |
DAI YUAN-TUNG;LIAO TSUNG-NENG;LEE CHUN-CHI |
分类号 |
H01L21/00;H01L21/84;H01L27/146 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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