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发明名称
substrate processing system
摘要
申请公布号
KR100544487(B1)
申请公布日期
2006.01.23
申请号
KR20030096537
申请日期
2003.12.24
申请人
发明人
分类号
B08B5/04;G02F1/13;B08B3/02;B65G49/00;B65G49/06;H01L21/304;H01L21/677;H01L21/68
主分类号
B08B5/04
代理机构
代理人
主权项
地址
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