Method of etching ferroelectric substrate,申请号KR20030077941-传众专利搜索

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发明名称	Method of etching ferroelectric substrate
摘要
申请公布号	KR100543409(B1)	申请公布日期	2006.01.23
申请号	KR20030077941	申请日期	2003.11.05
申请人		发明人
分类号	H01L21/3065	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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