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发明名称
MANUFACTURING METHOD OF SEMICONDUCTOR APPARATUS
摘要
申请公布号
KR100542850(B1)
申请公布日期
2006.01.20
申请号
KR20020075107
申请日期
2002.11.29
申请人
发明人
分类号
H01L21/304;H01L21/301;H01L21/78
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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